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Height Calibration by Histogram Analysis
Illustrates how the step height and z-correction factor can be deduced from a calibration sample.
 
Reference Image
The waffle pattern is ideal for z-calibration because it contains mainly two z-levels.
 
This image has been preprocessed by a plane correction to achieve the best accuracy.
 AFM image of waffle pattern for height calibration
Height Distribution Histogram
The two peaks reflect the two levels of the surface and the difference between the peak values reflects the step height.
 
SPIP™ can automatically detect the peaks and calculate the step height and the correction factor.
 Height distribution histogram for step height measurement
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