The Calibration Module enables you to perform measurements with sub-pixel accuracy. Calibration can be a complicated affaire. By use of the Calibration Module and calibration samples it is done easily.
Step heights can be measured very accurately and provide a proper correction
factor for the Z-dimension. The measurements can be based on automated histogram
analysis or the ISO 5436 standard. Lateral Calibration
The lateral calibration is done in three easy steps:
Acquire an image by your instrument
Load the image file into SPIP™
Enter the reference values
… and with a few mouse clicks you will have the most accurate calculations of
a comprehensive set of correction parameters, including scaling factors, the X-Y
coupling factor, and linearity parameters described by third order polynomials.
Advanced sub-pixel Fourier and correlation algorithms ensure the highest accuracy.
You can apply the parameters for off-line correction or transfer them to your
instrument for on-line correction.