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Calibration of Step Heights and Roughness Measurements with Atomic Force Microscopes
Published:
J. Garnæs, N.Kofod, A. Kühle, C. Nielsen, K. Dirscherl, and L. Blunt, Elsevier, Precision Engineering 27, 91-98, 2003 (DFM-03-P1)

SPIP™ used for:
Step height measurement and roughness analysis.

The following references have contributed to this publication:
Contributions by Jørgen Garnæs, Dr.Jørgen Garnæs, Dr.
Contributions by Anders van der Aa Kühle, Dr. Anders van der Aa Kühle, Dr.
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