| File Format | Manufacturer | Ext | Instrument Type | Export | CITS | STS | FC | FV |
| A.P.E Research Proprietary | A.P.E. Research s.r.l. | .dat
| SPM
| | | | | |
| Aarhus University Proprietary | Aarhus University, Dept. of Physics and Astronomy | .bio
.img
.mul
| STM
| | | | | |
| ADE Phase Shift | KLA-Tencor Corporation | .map
| Interference microscope
| | | | | |
| aep Technology Proprietary | aep Technology | .dat
| 3D Profilometer
| | | | | |
| Ambios Proprietary .abm | Ambios Technology, Inc. | .amb
| 3D Profilometer
| | | | | |
| Ambios Proprietary .bii | Ambios Technology, Inc. | .bii
| AFM
| | | | | |
| Ambios Proprietary .txt | Ambios Technology, Inc. | .txt
| Profilometer
| | | | | |
| Anfatec Proprietary | Anfatec | .int
| SPM
| | | | | |
| ASCII | | .asc
.txt
| |  | | | | |
| Asylum Research Proprietary | Asylum Research | .ibw
| SPM
| | | | | |
| ATOS Interference | ATOS GmbH | .mmd
| Interference microscope
| | | | | |
| BCR-SDF | | .bcr
| | | | | | |
| Bitmap | | .bmp
| | | | | | |
| Burleigh Proprietary | EXFO Burleigh Products Group Inc. | .img
| SPM
| | | | | |
| Caliber / Innova | Veeco Instruments | .dat
.flt
.psd
| SPM
| | | | | |
| Danish Micro Engineering Proprietary | Danish Micro Engineering A/S | .mif
| SPM
| | | | | |
| Dektak | Veeco Instruments | .*
.dt2
.opd
| Profilometer
| | | | | |
| Digital Surf Proprietary | Digital Surf | .pro
.sur
| Profilometer
| | | | | |
| Dimension Systems | Veeco Instruments | .*
| SPM
| | | | | |
| EasyScan | Nanosurf AG | .ezd
| SPM
| | | | | |
| Fogale | FOGALE nanotech | .tpo
| Interference microscope
| | | | | |
| GFMesstechnik Proprietary | GFMesstechnik GmbH | .fd3
| Optical profiler
| | | | | |
| Hitachi Kenki Proprietary | Hitachi Kenki FineTech Co., Ltd. | .afm
| AFM
| | | | | |
| Hysitron | Hysitron, Inc. | .hdf
| AFM
Indenter
| | | | | |
| IBM Proprietary | IBM | .dat
| SPM
| | | | | |
| Image Metrology Proprietary .bcr | Image Metrology A/S | .bcr
.bcrf
| | | | | | |
| JEOL Proprietary | JEOL | .spc
.tif
| SPM
| | | | | |
| JPEG | | .jpeg
.jpg
| | | | | | |
| JPK Force Curve | JPK Instruments AG | .out
| AFM
| | | | | |
| JPK Force Volume | JPK Instruments AG | .map_txt
| | | | | | |
| JPK Instruments Proprietary | JPK Instruments AG | .jpk
.xml
| SPM
| | | | | |
| Keyence Proprietary | Keyence Corporation | .vk3
| | | | | | |
| KLA Tencor P-16 | KLA-Tencor Corporation | .3DD
.map
| 3D Profilometer
| | | | | |
| KLA-Tencor Proprietary | KLA-Tencor Corporation | .3d
.3DD
.dat
| Profilometer
| | | | | |
| Lasertec Proprietary | Lasertec Corporation | .lms
| Confocal microscope
| | | | | |
| LT-STM | VTS-CreaTec GmbH | .dat
| STM
| | | | | |
| Matrix | Omicron NanoTechnology GmbH | .*
.mtrx
| SPM
| | | | | |
| MeX 3D SEM | Alicona Imaging GmbH | .al3d
| SEM
| | | | | |
| MTS SDF | MTS Nano Instruments | .sdf
| Indenter
SPM
| | | | | |
| NanoEducatorSPM | NT-MDT Co. | .spm
| SPM
| | | | | |
| NanoFocus Proprietary | NanoFocus AG | .nms
.oms
| Confocal microscope
| | | | | |
| NanoMagnetics Proprietary | NanoMagnetics Instruments Ltd. | .sif
| SPM
| | | | | |
| Nanonics Imaging Proprietary | Nanonics Imaging Ltd. | .img
| SPM
| | | | | |
| Nanonis Proprietary | Nanonis | .sxm
| SPM
| | | | | |
| NanoScope II | Veeco Instruments | .*
| SPM
| | | | | |
| NanoScope III | Veeco Instruments | .*
| SPM
| | | | | |
| Nanosurf Image Document | Nanosurf AG | .nid
| SPM
| | | | | |
| NT-MDT Proprietary | NT-MDT Co. | .mdt
| SPM
| | | | | |
| Oxford Proprietary | Oxford Instruments plc | .top
.viw
.wat
| SPM
| | | | | |
| Pacific Nanotechnology, .pni | Pacific Nanotechnology, Inc. | .pni
| SPM
| | | | | |
| Pacific Nanotechnology, .pro | Pacific Nanotechnology, Inc. | .pro
| SPM
| | | | | |
| Pacific Nanotechnology, .sur | Pacific Nanotechnology, Inc. | .sur
| SPM
| | | | | |
| Park | Veeco Instruments | .hdf
| SPM
| | | | | |
| PicoSPM | Agilent Technologies (Molecular Imaging) | .asc
.ivs
.stp
| SPM
| | | | | |
| PicoView | Agilent Technologies (Molecular Imaging) | .im
| SPM
| | | | | |
| PSIA Proprietary | Park Systems Corp. | .tif
.tiff
| SPM
| | | | | |
| Quesant Instrument Proprietary | Quesant Instrument Corporation | .afm
| SPM
| | | | | |
| RasterScope | Danish Micro Engineering A/S | .*
| SPM
| | | | | |
| RHK Technology Proprietary | RHK Technology, Inc | .*
.sm2
| SPM
| | | | | |
| RHK Technology Proprietary .sm3 | RHK Technology, Inc | .sm3
| SPM
| | | | | |
| RHK Technology Proprietary .sm4 | RHK Technology, Inc | .sm4
| STM
| | | | | |
| Scala | Omicron NanoTechnology GmbH | .par
.sf0
.tf0
| SPM
| | | | | |
| SDF | | .sdf
| | | | | | |
| Sensofar | Sensofar | .plu
| Confocal microscope
| | | | | |
| Shimadzu SPM | Shimadzu Corporation | .*
| SPM
| | | | | |
| SII Nano Technology Proprietary | SII NanoTechnology, Inc. | .ia*
.in*
.xf*
.xjd
.xjf
.xq*
| SPM
| | | | | |
| SIS Force Curve | Bruker Nano GmbH | .txt
| AFM
| | | | | |
| SIS Proprietary | Bruker Nano GmbH | .sis
| SPM
| | | | | |
| SNU Precision Proprietary | SNU Precision Co,.Ltd | .spm
| STM
| | | | | |
| STM 150 Aarhus | SPECS Surface Nano Analysis GmbH | .bio
.img
.mul
| STM
| | | | | |
| Strip chart Nanoscope files | Veeco Instruments | .hsdc
| SPM
| | | | | |
| Taylor Hobson Proprietary | Taylor Hobson | .sur
| Profilometer
| | | | | |
| ThermoMicroscope | Veeco Instruments | .sdf
| SPM
| | | | | |
| TIFF | | .tif
.tiff
| | | | | | |
| TNW Biophysical Engineering Group Proprietary | University of Twente | .*
| AFM
| | | | | |
| TopoMetrix | Veeco Instruments | .tfr
| SPM
| | | | | |
| Toray Engineering Proprietary | Toray Engineering Co., Ltd. | .sp
| Interference microscope
| | | | | |
| UNISOKU Proprietary .dat, .hdr | UNISOKU Co., Ltd | .dat
.hdr
| SPM
| | | | | |
| UNISOKU Proprietary .usd | UNISOKU Co., Ltd | .usd
| SPM
| | | | | |
| WSxM | Nanotec Electronica | .stp
| SPM
| | | | | |
| Wyko | Veeco Instruments | .opd
.wfd
| Interference microscope
| | | | | |
| Zeiss Confocal Scanning Microscope | Carl Zeiss MicroImaging Inc. | .sdf
| Confocal microscope
| | | | | |
| Zemetrics Proprietary | Zemetrics, Inc. | .zmp
| Interference microscope
| | | | | |
| Zygo Proprietary | Zygo Corporation | .dat
| Interference microscope
| | | | | |
